题目：Flexure-Based Linear Actuator for Nano-precision Manufacturing

时 间：7月3日（星期四）上午10：00

地 点：365电子竞技官网第三会议室

报告人：Professor I-Ming Chen

School of Mechanical and Aerospace Engineering

Nanyang Technological University

Singapore

ABSTRACT：

This talk introduces a novel nano-positioning actuator that offers large millimeter-range workspace and large driving force is required. Termed as a Flexural-based electromagnetic linear actuator (FELA), it mainly comprised of an electromagnetic driving scheme and flexural bearings that provides infinite positioning resolution and highly repeatable motion. Analytical modeling of the electromagnetic driving scheme and flexural mechanism are presented. Solutions of the EM model are validated experimentally from the FELA prototype. This prototype achieves 4mm of stroke with 10nm of positioning accuracy. With a direct force control scheme, it generates force at 60N/Amp with an accuracy of 0.3N. Such capabilities make FELA as a promising solution for realizing ultra-high precision layer-over-layer imprint control in the nano imprinting processes.

Speaker:

Prof. Chen received the B. S. degree from National Taiwan University in 1986, and M. S. and Ph. D. degrees from California Institute of Technology, Pasadena, CA in 1989 and 1994 respectively. He has been with the School of Mechanical and Aerospace Engineering of Nanyang Technological University (NTU) in Singapore since 1995. He is currently Director of Intelligent Systems Center in NTU, a partnership between Singapore Technology Engineering Ltd. and NTU. He was JSPS Visiting Scholar in Kyoto University, Japan in 1999, Visiting Scholar in the Department of Mechanical Engineering of MIT in 2004, and Fellow of Singapore-MIT Alliance under Manufacturing Systems and Technology (MST) Program from 2002 to 2007. He is also Adjunct Professor of Xian Jiao Tong University, China from 2002 to 2007. His research interests are in wearable sensors, human-robot interaction, precision engineering, reconfigurable automation, parallel kinematics machines (PKM), and smart material based actuators. Dr. Chen has published more than 170 technical articles in refereed international journals and conferences. He is now serving on the editorial boards of IEEE Transactions on Robotics, IEEE/ASME Transactions on Mechatronics, Robotica, and is Associate Editor-in-Chief of Frontier of Mechanical Engineering. He will be General Chairman of 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM2009) in Singapore. He is a senior member of IEEE and member of ASME, and member of RoboCup Singapore National Committee.

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